@techreport{Manjunath91-187
	author		= {B.S. Manjunath and P.B. Chou and R.S Jaffe},
	title		= {Optical Detection of Defects in Semiconductor Wafers Using Technical Artificial Neural Networks},
	booktitle	= {Unpublished IBM Internal Report},
	month		= {Aug},
	year		= {1991},
}